JPS62114055U - - Google Patents
Info
- Publication number
- JPS62114055U JPS62114055U JP77586U JP77586U JPS62114055U JP S62114055 U JPS62114055 U JP S62114055U JP 77586 U JP77586 U JP 77586U JP 77586 U JP77586 U JP 77586U JP S62114055 U JPS62114055 U JP S62114055U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- hearth
- evaporation source
- opening
- deck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims description 13
- 238000001704 evaporation Methods 0.000 claims description 13
- 230000002265 prevention Effects 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP77586U JPH0241167Y2 (en]) | 1986-01-08 | 1986-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP77586U JPH0241167Y2 (en]) | 1986-01-08 | 1986-01-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62114055U true JPS62114055U (en]) | 1987-07-20 |
| JPH0241167Y2 JPH0241167Y2 (en]) | 1990-11-01 |
Family
ID=30778060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP77586U Expired JPH0241167Y2 (en]) | 1986-01-08 | 1986-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241167Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002097566A (ja) * | 2000-09-18 | 2002-04-02 | Toyo Commun Equip Co Ltd | 電子ビーム蒸着用電子銃 |
-
1986
- 1986-01-08 JP JP77586U patent/JPH0241167Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002097566A (ja) * | 2000-09-18 | 2002-04-02 | Toyo Commun Equip Co Ltd | 電子ビーム蒸着用電子銃 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0241167Y2 (en]) | 1990-11-01 |